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PLASSYS - 2006 - CVD500 - Semiconductor Production Equipment
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- Status
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Lot specifications
- Quantity
- 1
- Margin
- No
- Brand
- PLASSYS
- Type
- CVD500
- Year of build
- 2006
- Terms of delivery
- Ex foundation-unpackaged
Description
The equipment includes a complete vacuum/CVD system with its control electronics, vacuum components, high vacuum pumps, RF power supplies, actuators and sensors. The chassis, originally manufactured in 1998, underwent a major upgrade in 2011 with newer components.
The system is sold as is, for parts or to be repaired. The system was not fully connected and did not have a password, which precludes further testing.
The system consists of the following main components:
Vacuum and pumping
components Turbo pump ALCATEL / ADIXEN / PFEIFFER ATH 1300M
2 Leybold CTR 90 CERAVAC
vacuum cleaners PFEIFFER IKR 251
Compact Cold Cathode Gauge Vacuum Angle Valve TVA 26432-KA41-0001/0319
Large size
additional VAT vacuum valve Large set of high
vacuum valves Actuation System: THC-8AWDS Linear Actuator (400mm Stroke)
Various sensors, including pressure, temperature, and switching
Various actuators, including solenoid valves and heating
elements CVD framework (original SP-500, modified in 2011)
Mass flow control cabinet (included)
RF Power and Power
Dressler RF Amplifier – AE Dressler VM 1000 A, 1000 W, 13.56 MHz
RF10S
RFPP Unit Advanced Energy MDX 500 (Non-Functional – Does Not Turn On)
RF power AM-5 7600001010, 500 W, 13.56 MHz
TDK Lambda GEN40-125
Power Supply Control unit and electronics
ALCATEL / ADIXEN / PFEIFFER ACT 1300M
controller MKS Exhaust Valve Controller Type 252C-1-VPO
MKS Type 152
Automatic Pressure Controller MKS Type 600
Automatic Pressure Controller MKS Type 2708
19" rackmount PC (no password for control software) Palletizing and loading to be done by the buyer on site
The system consists of the following main components:
Vacuum and pumping
components Turbo pump ALCATEL / ADIXEN / PFEIFFER ATH 1300M
2 Leybold CTR 90 CERAVAC
vacuum cleaners PFEIFFER IKR 251
Compact Cold Cathode Gauge Vacuum Angle Valve TVA 26432-KA41-0001/0319
Large size
additional VAT vacuum valve Large set of high
vacuum valves Actuation System: THC-8AWDS Linear Actuator (400mm Stroke)
Various sensors, including pressure, temperature, and switching
Various actuators, including solenoid valves and heating
elements CVD framework (original SP-500, modified in 2011)
Mass flow control cabinet (included)
RF Power and Power
Dressler RF Amplifier – AE Dressler VM 1000 A, 1000 W, 13.56 MHz
RF10S
RFPP Unit Advanced Energy MDX 500 (Non-Functional – Does Not Turn On)
RF power AM-5 7600001010, 500 W, 13.56 MHz
TDK Lambda GEN40-125
Power Supply Control unit and electronics
ALCATEL / ADIXEN / PFEIFFER ACT 1300M
controller MKS Exhaust Valve Controller Type 252C-1-VPO
MKS Type 152
Automatic Pressure Controller MKS Type 600
Automatic Pressure Controller MKS Type 2708
19" rackmount PC (no password for control software) Palletizing and loading to be done by the buyer on site
Additional details
The dimensions and weights indicated for each batch are provided as a guide and correspond to the current condition of the equipment.
Certain dismantling, handling or packaging operations can modify this data and influence the methods of transport.
It is the buyer's responsibility to check the necessary specifications before any transport or collection arrangements.
Pick-ups will only be made after full payment of the invoice and by prior appointment.
Depending on the batch, loading aid or specific handling conditions may be applied.
For lots 1 and 2, the dismantling, packaging and palletizing operations are the sole responsibility of the buyer.
