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Laboratory equipment package
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Lot specifications
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Description
Turbomolecular vacuum pump and controller not present!
2× Leybold Vacuum CTR 90 CERAVAC
PFEIFFER IKR 251 compact cold cathode gauge
VAT 26432-KA41-0001/0319 vacuum angle valve
Additional large VAT vacuum valve
Large high-vacuum valve assembly
Gas Handling, Actuation & Process Hardware
Actuation System THC-8AWDS linear actuator (400 mm travel)
Various sensors, including pressure, temperature and switching sensors
Various actuators including solenoid valves and heating elements
CVD frame (original SP-500, retrofitted 2011)
Mass flow control cabinet (included)
Safety & Process Protection
RF & Power Delivery
RF DRESSLER – AE Dressler VM 1000 A, 1000 W, 13.56 MHz
RFPP RF10S unit
Advanced Energy MDX 500 (non-functional – does not turn on)
RF Power AM-5 7600001010, 500 W, 13.56 MHz
TDK Lambda power supply GEN40-125
Control Unit & Electronics
MKS Type 252C-1-VPO exhaust valve controller
MKS Type 152 automatic pressure controller
MKS Type 600 automatic pressure controller
MKS Type 2708
19" rack-mount PC (no password for the control software)
2× Leybold Vacuum CTR 90 CERAVAC
PFEIFFER IKR 251 compact cold cathode gauge
VAT 26432-KA41-0001/0319 vacuum angle valve
Additional large VAT vacuum valve
Large high-vacuum valve assembly
Gas Handling, Actuation & Process Hardware
Actuation System THC-8AWDS linear actuator (400 mm travel)
Various sensors, including pressure, temperature and switching sensors
Various actuators including solenoid valves and heating elements
CVD frame (original SP-500, retrofitted 2011)
Mass flow control cabinet (included)
Safety & Process Protection
RF & Power Delivery
RF DRESSLER – AE Dressler VM 1000 A, 1000 W, 13.56 MHz
RFPP RF10S unit
Advanced Energy MDX 500 (non-functional – does not turn on)
RF Power AM-5 7600001010, 500 W, 13.56 MHz
TDK Lambda power supply GEN40-125
Control Unit & Electronics
MKS Type 252C-1-VPO exhaust valve controller
MKS Type 152 automatic pressure controller
MKS Type 600 automatic pressure controller
MKS Type 2708
19" rack-mount PC (no password for the control software)
Additional details
The dimensions and weights indicated for each batch are provided as a guide and correspond to the current condition of the equipment.
Certain dismantling, handling or packaging operations can modify this data and influence the methods of transport.
It is the buyer's responsibility to check the necessary specifications before any transport or collection arrangements.
Pick-ups will only be made after full payment of the invoice and by prior appointment.
Depending on the batch, loading aid or specific handling conditions may be applied.